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1

Properties of AlN grown by plasma enhanced atomic layer deposition

Markus Bosund, Timo Sajavaara, Mikko Laitinen, Teppo Huhtio, Matti Putkonen, Veli-Matti Airaksinen, Harri Lipsanen

Journal:

Applied Surface Science

Year:

2011

Language:

english

File:

PDF, 999 KB

english, 2011

2

Tribological properties of thin films made by atomic layer deposition sliding against silicon

Kilpi, Lauri, Ylivaara, Oili M. E., Vaajoki, Antti, Liu, Xuwen, Rontu, Ville, Sintonen, Sakari, Haimi, Eero, Malm, Jari, Bosund, Markus, Tuominen, Marko, Sajavaara, Timo, Lipsanen, Harri, Hannula, Sim

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

2018

Language:

english

File:

PDF, 2.95 MB

english, 2018

3

Thermal and plasma enhanced atomic layer deposition of SiO2 using commercial silicon precursors

Putkonen, Matti, Bosund, Markus, Ylivaara, Oili M.E., Puurunen, Riikka L., Kilpi, Lauri, Ronkainen, Helena, Sintonen, Sakari, Ali, Saima, Lipsanen, Harri, Liu, Xuwen, Haimi, Eero, Hannula, Simo-Pekka,

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 664 KB

english, 2014

4

GaAs surface passivation by plasma-enhanced atomic-layer-deposited aluminum nitride

M. Bosund, P. Mattila, A. Aierken, T. Hakkarainen, H. Koskenvaara, M. Sopanen, V.-M. Airaksinen, H. Lipsanen

Journal:

Applied Surface Science

Year:

2010

Language:

english

File:

PDF, 239 KB

english, 2010

5

Plasma etch characteristics of aluminum nitride mask layers grown by low-temperature plasma enhanced atomic layer deposition in SF6 based plasmas

Perros, Alexander, Bosund, Markus, Sajavaara, Timo, Laitinen, Mikko, Sainiemi, Lauri, Huhtio, Teppo, Lipsanen, Harri

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

2012

Language:

english

File:

PDF, 930 KB

english, 2012

6

Passivation of GaAs surface by atomic-layer-deposited titanium nitride

M. Bosund, A. Aierken, J. Tiilikainen, T. Hakkarainen, H. Lipsanen

Journal:

Applied Surface Science

Year:

2008

Language:

english

File:

PDF, 793 KB

english, 2008

7

[Advances in Food Research] Advances in Food Research Volume 11 Volume 11 || The Action of Benzoic and Salicylic Acids on the Metabolism of Microorganisms

Year:

1963

Language:

english

File:

PDF, 1.39 MB

english, 1963

8

ATOMIC LAYER DEPOSITION HfO 2 FILM USED AS BUFFER LAYER OF THE Pt/(Bi 0.95 Nd 0.05 )(Fe 0.95 Mn 0.05 )O 3 /HfO 2 /Si CAPACITORS FOR FeFET APPLICATION

XIE, DAN, FENG, TINGTING, LUO, YAFENG, HAN, XUEGUANG, REN, TIANLING, BOSUND, MARKUS, LI, SHUO, AIRAKSINEN, VELI-MATTI, LIPSANEN, HARRI, HONKANEN, SEPPO

Journal:

Journal of Advanced Dielectrics

Year:

2011

Language:

english

File:

PDF, 729 KB

english, 2011

9

Erratum to “GaAs surface passivation by plasma-enhanced atomic-layer-deposited aluminum nitride” [Appl. Surf. Sci. 256 (2010) 7434–7437]

M. Bosund, P. Mattila, A. Aierken, T. Hakkarainen, H. Koskenvaara, M. Sopanen, V.-M. Airaksinen, H. Lipsanen

Journal:

Applied Surface Science

Year:

2011

Language:

english

File:

PDF, 129 KB

english, 2011

10

Nitrate accumulation in spinach

W. Schuthan, B. Bengtsson, I. Bosund, B. Hylmö

Journal:

Plant Foods for Human Nutrition

Year:

1967

Language:

english

File:

PDF, 1005 KB

english, 1967

11

Atomic layer deposition of ytterbium oxide using -diketonate and ozone precursors

M. Bosund, K. Mizohata, T. Hakkarainen, M. Putkonen, M. Söderlund, S. Honkanen, H. Lipsanen

Journal:

Applied Surface Science

Year:

2009

Language:

english

File:

PDF, 351 KB

english, 2009

12

Atomic layer deposited TiO2 films in photodegradation of aqueous salicylic acid

Sari Vilhunen, Markus Bosund, Marja-Leena Kääriäinen, David Cameron, Mika Sillanpää

Journal:

Separation and Purification Technology

Year:

2009

Language:

english

File:

PDF, 430 KB

english, 2009

13

Lipid Hydrolysis in Unblanched Frozen Peas (Pisum sativum)

B. BENGTSSON, I. BOSUND

Journal:

Journal of Food Science

Year:

1966

Language:

english

File:

PDF, 693 KB

english, 1966

14

Lipid Hydrolysis in Frozen Baltic Herring

INGMAR BOSUND, BERTIL GANROT

Journal:

Journal of Food Science

Year:

1969

Language:

english

File:

PDF, 625 KB

english, 1969

15

The Bacteriostatic Action of Benzoic and Salicylic Acids. : VI. Influence of Amino Acids and Related Substances on the Growth Inhibition

I. Bosund, I. Erichsen, N. Molin

Journal:

Physiologia Plantarum

Year:

1960

Language:

english

File:

PDF, 2.62 MB

english, 1960

16

The Bacteriostatic Action of Benzoic and Salicylic Acids. : VII. Effect on Acetate Metabolism and Formation of Adaptive Enzymes in Pseudomonas fluorescens

Journal:

Physiologia Plantarum

Year:

1960

Language:

english

File:

PDF, 2.46 MB

english, 1960

17

Effect of atomic-layer-deposited AlN on near-surface InGaAs/GaAs structures

Päivi Mattila, Markus Bosund, Henri Jussila, Turkka Tuomi, Juha Riikonen, Teppo Huhtio, Harri Lipsanen, Markku Sopanen

Journal:

physica status solidi (c)

Year:

2012

Language:

english

File:

PDF, 584 KB

english, 2012

18

Effect of growth temperature on the epitaxial growth of ZnO on GaN by ALD

Särkijärvi, Suvi, Sintonen, Sakari, Tuomisto, Filip, Bosund, Markus, Suihkonen, Sami, Lipsanen, Harri

Journal:

Journal of Crystal Growth

Year:

2014

Language:

english

File:

PDF, 7.08 MB

english, 2014

19

Properties of atomic-layer-deposited ultra-thin AlN films on GaAs surfaces

Mattila, P., Bosund, M., Jussila, H., Aierken, A., Riikonen, J., Huhtio, T., Lipsanen, H., Sopanen, M.

Journal:

Applied Surface Science

Year:

2014

Language:

english

File:

PDF, 1.05 MB

english, 2014

20

[IEEE 2011 International Conference of Electron Devices and Solid-State Circuits (EDSSC) - Tianjin, China (2011.11.17-2011.11.18)] 2011 IEEE International Conference of Electron Devices and Solid-State Circuits - Nd-doped Bismuth Titanate based ferroelectric field effect transistor: Design, fabrication, and optimization

Feng, Tingling, Xie, Dan, Zang, Yongyuan, Wu, Xaio, Luo, Yafeng, Ren, Tianling, Bosund, Markus, Li, Shuo, Airaksinen, Veli-Matti, Lipsanen, Harri, Honkanen, Seppo

Year:

2011

File:

PDF, 509 KB

2011

21

High-k GaAs metal insulator semiconductor capacitors passivated by ex-situ plasma-enhanced atomic layer deposited AlN for Fermi-level unpinning

Jussila, H., Mattila, P., Oksanen, J., Perros, A., Riikonen, J., Bosund, M., Varpula, A., Huhtio, T., Lipsanen, H., Sopanen, M.

Journal:

Applied Physics Letters

Year:

2012

Language:

english

File:

PDF, 595 KB

english, 2012

22

Comparison of ammonia plasma and AlN passivation by plasma-enhanced atomic layer deposition

P. Mattila, M. Bosund, T. Huhtio, H. Lipsanen, M. Sopanen

Year:

2012

Language:

english

File:

PDF, 766 KB

english, 2012

23

SPIE Proceedings [SPIE SPIE LASE - San Francisco, California, USA (Saturday 21 January 2012)] Fiber Lasers IX: Technology, Systems, and Applications - Atomic layer deposition for fabrication of ytterbium doped fibers

Montiel i Ponsoda, Joan J., Norin, Lars, Bosund, Markus, Ye, Changgeng, Söderlund, Mikko J., Tervonen, Ari, Honkanen, Seppo

Year:

2012

Language:

english

File:

PDF, 1.09 MB

english, 2012

24

Genetic algorithm using independent component analysis in x-ray reflectivity curve fitting of periodic layer structures

J. Tiilikainen, V. Bosund, J. Tilli, J. Sormunen, M. Mattila, T. Hakkarainen, H. Lipsanen

Year:

2007

Language:

english

File:

PDF, 234 KB

english, 2007

25

Ytterbium-doped fibers fabricated with atomic layer deposition method

Montiel i Ponsoda, Joan J., Norin, Lars, Ye, Changgeng, Bosund, Markus, Söderlund, Mikko J., Tervonen, Ari, Honkanen, Seppo

Journal:

Year:

2012

Language:

english

File:

PDF, 2.16 MB

english, 2012

26

Fitness function and nonunique solutions in x-ray reflectivity curve fitting: crosserror between surface roughness and mass density

J. Tiilikainen, V. Bosund, M. Mattila, T. Hakkarainen, J. Sormunen, H. Lipsanen

Year:

2007

Language:

english

File:

PDF, 534 KB

english, 2007

27

Accuracy in x-ray reflectivity analysis

Tiilikainen, J, Tilli, J-M, Bosund, V, Mattila, M, Hakkarainen, T, Sormunen, J, Lipsanen, H

Journal:

Journal of Physics D Applied Physics

Year:

2007

Language:

english

File:

PDF, 312 KB

english, 2007

28

Nonlinear fitness–space–structure adaptation and principal component analysis in genetic algorithms: an application to x-ray reflectivity analysis

Tiilikainen, J, Tilli, J-M, Bosund, V, Mattila, M, Hakkarainen, T, Airaksinen, V-M, Lipsanen, H

Journal:

Journal of Physics D Applied Physics

Year:

2007

Language:

english

File:

PDF, 291 KB

english, 2007

29

Mineral Salts and Oxalate Content in Spinach Leaves as a Function of Development Stage

Bengtsson, Bengt L., Bosund, Ingmar, Hylmö, Bertil

Journal:

Journal of Plant Nutrition and Soil Science

Year:

1966

Language:

english

File:

PDF, 399 KB

english, 1966

30

Atomic Layer Deposition Al 2 O 3 Coatings Significantly Improve Thermal, Chemical, and Mechanical Stability of Anodic TiO 2 Nanotube Layers

Zazpe, Raul, Prikryl, Jan, Gärtnerova, Viera, Nechvilova, Katerina, Benes, Ludvik, Strizik, Lukas, Jäger, Ales, Bosund, Markus, Sopha, Hanna, Macak, Jan M.

Journal:

Year:

2017

Language:

english

File:

PDF, 6.57 MB

english, 2017

31

Comparative study and characterization of atomic layer deposition Al 2 O 3 films as metal-insulator-metal capacitor dielectric for GaAs hetero-junction bipolar transistor technology

Yota, Jiro, Janani, Mehran, Banbrook, Hal M., Rabinzohn, Patrick, Bosund, Markus

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

2019

Language:

english

File:

PDF, 1.00 MB

english, 2019

32

Control of Eu Oxidation State in Y2O3âxSx:Eu Thin-Film Phosphors Prepared by Atomic Layer Deposition: A Structural and Photoluminescence Study

Rosa, JosÃ©, Deuermeier, Jonas, Soininen, Pekka J., Bosund, Markus, Zhu, Zhen, Fortunato, Elvira, Martins, Rodrigo, Sugiyama, Mutsumi, Merdes, Saoussen

Journal:

Year:

2019

File:

PDF, 1.83 MB

2019